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August 2026

• patent · 23 Feb 2010 · added 2 months ago

  Wiring and manufacturing method thereof, semiconductor device comprising said wiring, and dry etching method

• patent · 1 Dec 2005 · added 2 months ago

  Wiring and manufacturing method thereof, semiconductor device comprising said wiring, and dry etching method

• patent · 2 Jun 2015 · added 2 months ago

  Wiring and manufacturing method thereof, semiconductor device comprising said wiring, and dry etching method

• patent · 22 Dec 2009 · added 2 months ago

  Wiring and manufacturing method thereof, semiconductor device comprising said wiring, and dry etching method

• patent · 6 Nov 2001 · added 2 months ago

  Method for low thermal budget metal filling and planarization of contacts vias and trenches

• patent · 17 Apr 2001 · added 2 months ago

  Filling narrow apertures and forming interconnects with a metal utilizing a crystallographically oriented liner layer

• patent · 3 Jul 1991 · added 2 months ago

  Processes depending on plasma generation

• patent · 22 Sep 1993 · added 2 months ago

  Apparatus and method for plasma treatment of resin material

• patent · 2 Aug 2022 · added 2 months ago

  Film deposition apparatus for fine pattern forming

• patent · 28 Jun 2022 · added 2 months ago

  Nanowire grid polarizer on a curved surface and methods of making and using

• patent · 29 Dec 2020 · added 2 months ago

  Wavelike hard nanomask on a topographic feature and methods of making and using

• patent · 2 Jun 2020 · added 2 months ago

  Optical memory devices using a silicon wire grid polarizer and methods of making and using

• patent · 16 May 2017 · added 2 months ago

  Arrangements with pyramidal features having at least one nanostructured surface and methods of making and using

• patent · 22 Nov 2016 · added 2 months ago

  Polarizer based on a nanowire grid

• patent · 29 Dec 2015 · added 2 months ago

  Light emitting diode with nanostructured layer and methods of making and using

• patent · 15 Sep 2015 · added 2 months ago

  SERS-sensor with nanostructured layer and methods of making and using

• patent · 16 Jun 2015 · added 2 months ago

  SERS-sensor with nanostructured surface and methods of making and using

• patent · 14 Oct 2014 · added 2 months ago

  Solar cell with nanostructured layer and methods of making and using

• patent · 12 Dec 2013 · added 2 months ago

  Fluid capture of nanoparticles

• patent · 3 Oct 2000 · added 2 months ago

  Method and apparatus for etching a semiconductor wafer with features having vertical sidewalls

• patent · 6 Jun 2000 · added 2 months ago

  Plasma processing system

• patent · 11 Apr 2000 · added 2 months ago

  Plasma etch reactor and method for emerging films

• patent · 4 Apr 2000 · added 2 months ago

  Aluminum hole filling method using ionized metal adhesion layer

• patent · 5 Oct 1999 · added 2 months ago

  Semiconductor device having a low thermal budget metal filling and planarization of contacts, vias and trenches

• patent · 13 Oct 1993 · added 2 months ago

  Method and apparatus for producing variable spatial frequency control in plasma assisted chemical etching

• patent · 19 Apr 2022 · added 2 months ago

  Optical memory devices using a silicon wire grid polarizer and methods of making and using

• patent · 15 Jun 2021 · added 2 months ago

  Optical memory devices using a silicon wire grid polarizer and methods of making and using

• patent · 15 Nov 2001 · added 2 months ago

  Semiconductor device and manufacturing method thereof

• patent · 29 Apr 2025 · added 2 months ago

  Film deposition apparatus for fine pattern forming

• patent · 22 Mar 2011 · added 2 months ago

  Method for manufacturing printing plate